TY  - JOUR
TI  - Al2O3 thin film deposition using thermionic vacuum ARC
AU  - AKAN, T.
AU  - KARAKAŞ, E.
AU  - MUSA, G.
JO  - Sigma Journal of Engineering and Natural Sciences
PY  - 2005
VL  - 23
SP  - 18
EP  - 23
DO  - 
ER  -